Powerex SF130872PHA air compressor
Introduction
Powerex SF130872PHA air compressor is an oil-free gas supply unit that provides clean gas source for semiconductor equipment.
Product Features:
1. Oil free vortex structure, outputting clean compressed air without polluting the process chamber
2. Low vibration and noise during operation, suitable for long-term operation inside workshop cabinets
3. Equipped with overheating and overload protection, the machine automatically shuts down in case of abnormal conditions
4. The disassembly and assembly of components are simple, and the daily maintenance workload is relatively low
5. Support continuous uninterrupted output and adapt to the factory's 7 × 24-hour mass production conditions
Product Parameters:
1. Output clean oil-free compressed air source, matched with equipment air source interface
2. Built in intake filter component, filters impurities in the outside air
3. Equipped with high temperature and overload shutdown protection triggering mechanism
4. Adapt to the conventional environmental temperature conditions between workshop equipment
5. Can output operational status signals and interface with equipment monitoring systems
Application fields:
1. Pneumatic valves and cylinder driven air supply for semiconductor machines
2. Wafer processing equipment blowing, isolation gas process gas supply
3. Replacement of spare parts for old production line air compressors after failure
4. Clean compressed air matching for precision industrial equipment
5. Debugging and use of the entire gas circuit system after equipment overhaul
The cleanliness of the output gas source of Powerex SF130872PHA directly affects the service life and process stability of the pneumatic components of the machine.
Product imag

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