AE 3152603-018 DC power module

AE 3152603-018 DC power module 

 Introduction

AE 3152603-018 belongs to the E'Wave series of semiconductor equipment dedicated DC power modules, which are commonly used for replacing spare parts in etching thin film equipment and have strong on-site adaptability.

5 product features:

1. Dual DC output architecture, stable process output, suitable for semiconductor cavity power supply requirements.

2. Built in fast arc suppression, responds quickly to ignition faults, and protects the rear cavity components.

3. Support remote communication control, can be connected to the device host to achieve parameter monitoring and status feedback.

4. Rack integrated chassis, reasonable air duct layout, balanced heat dissipation during long-term operation under full load.

5. Multiple hardware protections, automatic locking after overvoltage, overcurrent, and overheating triggers, reducing the risk of damage to the entire machine.

5 product parameters:

1. Three phase AC input, compatible with 208-480VAC industrial power supply, 50/60Hz.

2. Dual independent DC power output, with a rated output power of 4kW for the entire machine.

3. Support external setting of output parameters for analog signals 0-10V and 4-20mA.

4. Standard 3U rack installation structure with forced air cooling for heat dissipation.

5. The working environment temperature is 0-45 ℃, suitable for clean workshop equipment cabin conditions.

5 application areas:

1. Semiconductor etching equipment, as a spare part for cavity bias DC power supply.

2. PVD thin film deposition equipment, matched with process chamber DC power supply unit.

3. Novellus series process equipment factory replacement power module.

4. Wafer processing equipment, DC power supply for ion processing stations.

5. Repair of old equipment in semiconductor production line, replacement of power failure parts.

In general, this power supply belongs to semiconductor specific spare parts and is rarely used in ordinary industrial control projects. When selecting, it is necessary to check the material number of the entire equipment

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