Home > Product > DCS control system > TEL 2L87-085048-V1 Heating Controller

  • TEL 2L87-085048-V1 Heating Controller
  • TEL 2L87-085048-V1 Heating Controller
  • TEL 2L87-085048-V1 Heating Controller
TEL 2L87-085048-V1 Heating Controller TEL 2L87-085048-V1 Heating Controller TEL 2L87-085048-V1 Heating Controller

TEL 2L87-085048-V1 Heating Controller

TEL 2L87-085048-V1 Heating Controller        

 Introduction

TEL 2L87-085048-V1 Heating Controller Product Features

Introduction: TEL 2L87-085048-V1 is a dedicated heating control module for semiconductor equipment, with stable temperature control and suitable for wafer process temperature control scenarios.

High precision closed-loop temperature control with minimal temperature fluctuations

Specially adapted TEL etching and deposition equipment

Multi channel temperature signal acquisition, supporting multi-sensor access

Built in signal filtering, resistant to electromagnetic interference from devices

Real time fault detection and alarm for overheating and wire breakage

Equipped with hardware interlocking, automatically cuts off heating in case of abnormal conditions

Standard equipment bus communication, docking with the main control system

Compact board card structure, easy to assemble cabinet

Wide operating temperature range, suitable for semiconductor high-temperature processes

Isolation circuit design to protect the motherboard and heating load

Accurate power regulation, smooth and controllable heating and warming up

Process parameter storage, no loss of power-off data

Standardized interface terminals, easy to disassemble and connect

Durable industrial components, stable long-term continuous operation

Original factory supporting program, no need for additional debugging and adaptation

Conclusion: TEL 2L87-085048-V1 is specially designed for semiconductor production lines and is the core component of cavity heating and constant temperature control.

Product imag

2L87-085048-V1 (2).jpg

ontroller Module

YOKOGAWA NFDV551-P10 Digital Output Module
ProSoft PLX82-EIP-NPC Communication Module
 CS3107KT92 controller module

Other website links

HESG324063R100-H 控制器单元
216DB61 伺服冗余系统
HESG324013R101 伺服控制器 

PMB33F-10200-01DPW01R35KENP-R2-NS-NV-00
PMB33F-10200-00DAI01R32GENC-R2-NS-VS-00
PMB33F-10116-036SC6100-0AB00R22GENA-R1-NS-NV-01
PMB33F-10116-02CACR-SR30BIE12GR22HSNA-R1-NS-NV-04
PMB33F-10116-01CACR-1E-AM1VA-ER23GENA-R1-NS-VS-01
PMB33F-10116-006DD1681-0EA0R35KMNC-TS-RC-NV-02


Obtain the latest price of TEL 2L87-085048-V1 Heating Controller