Novellus 02-351554-00 Dynamic Controller

Novellus 02-351554-00 Dynamic Controller        

Product Details Introduction

Novellus 02-351554-00 Dynamic Controller

Novellus 02-351554-00 is compatible with the dynamic control of motion for Nofa CVD/PVD deposition equipment

Closed loop high-speed dynamic adjustment, real-time correction of operating deviation of the wafer stage

High frequency signal sampling to capture subtle displacement and vibration changes

Built in electromagnetic isolation filter to resist workshop RF interference

Multi channel encoder feedback interface, precise acquisition of axis position data

Integrated multiple safety protections for overcurrent, overspeed, and overheating

Dedicated bus docking with the main control of the entire machine, synchronizing the timing of process actions

Dust free industrial circuit board, low gas release suitable for clean workshops

Modular card insertion design, convenient disassembly and replacement of cabinets

Built in fault self check code, quickly locate abnormal movement

Adapt to wafer stage and multi axis linkage control of robotic arm

Optimize the cooling circuit and support 24-hour continuous full load operation

Store dynamic process parameters without losing power-off data

Factory matching and calibration of the entire machine, with simple on-site debugging steps

Compact board size, saving installation space inside the control cabinet

In summary, the Novellus 02-351554-00 dynamic controller has precise dynamic adjustment and stable operation, making it a dedicated motion control board for Nofa Semiconductor deposition equipment

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