3D80-00006-V1 pneumatic slit valve

3D80-00006-V1 pneumatic slit valve        

Product Details Introduction

3D80-00006-V1 pneumatic slit valve

Introduction: This TEL original pneumatic slit valve is used for semiconductor vacuum chambers, isolating chambers, and completing wafer vacuum transfer.

Compatible with Tokyo electronic process equipment, original matching without assembly deviation

Pneumatic drive structure, relying on clean air source to complete valve plate opening and closing

Valve chamber electrolytic polishing treatment, high cleanliness and extremely low dust production

High end fluororubber seal, excellent leakage rate under ultra-high vacuum

Built in position sensor, providing real-time feedback on valve opening/closing status

Fast opening and closing action speed, reducing the waiting time for wafer transfer

Roller cam transmission, with a long-lasting service life of millions of cycles

One piece stainless steel valve body, resistant to trace corrosive process gases

Bellows isolation transmission structure to prevent external impurities from entering the vacuum

Standardized flange interface, convenient disassembly and replacement of cavity

Adapt to high vacuum conditions, stably isolate different pressure chambers

Low friction guiding component, running smoothly without any jamming or abnormal noise

Suitable for 24-hour uninterrupted mass production and stable long-term operation

Supporting standard pneumatic connectors, simple and standardized pneumatic wiring

Used for wafer transport isolation between load lock and process chamber

Conclusion: 3D80-00006-V1 has strong sealing, cleanliness and durability, and is a spare part for the core vacuum transmission valve of semiconductor cluster equipment.

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