AMAT 0010-09120 Component Heater Motor

AMAT 0010-09120 Component Heater Motor        

Product Details Introduction

AMAT 0010-09120 Component Heater Motor

Introduction

AMAT 0010-09120 is an application material coating/etching chamber heating matching fan motor assembly, responsible for heater heat dissipation circulation and stabilizing the chamber temperature field.

Heat dissipation of high-temperature heaters adapted to semiconductor processes

Uniform air supply, uniform temperature distribution in the chamber

High temperature resistant insulation, no aging under long-term high temperature conditions

Low vibration and low noise, do not interfere with wafer processing

Built in overcurrent and overheat shutdown protection

Quick identification of locked rotor fault with status indicator light

Metal sealed shell, resistant to process trace corrosive gases

Strong and weak electrical isolation wiring, resistant to workshop electromagnetic interference

Standard flange interface, easy disassembly and replacement of the machine

Integrated bearing structure, long service life

Match AMAT Centura and Endura series machines

Power off to save operating parameters, restart without debugging required

Compact integrated assembly, occupying small space

Equipped with fault records, high efficiency in maintenance and troubleshooting

Modular structure, motor and fan blades can be replaced separately

ending

AMAT 0010-09120 has stable heat dissipation, high temperature resistance and durability, and is the core heat dissipation power component for semiconductor process chamber heaters.

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