Product Details Introduction
INFICON 961-H1MAP transmitter product features
beginning
INFICON 961-H1MAP is a signal transmission unit that is compatible with the Yingfukang Transspector XPR3+residual gas analyzer. It is suitable for gas monitoring in semiconductor high vacuum chambers and has stable signal transmission. Its core features are as follows:
Compatible with quadrupole mass spectrometry sensor, real-time transmission of trace gas partial pressure data
Low signal transmission loss, no distortion of weak impurity gas signals
Dual filament signal switching transmission ensures uninterrupted monitoring of equipment
Equipped with TCP/IP Ethernet communication, directly connected to the industrial control host of the production line
Wide vacuum working condition adaptation, with a maximum tolerance of 20mTorr process pressure
Built in signal filtering circuit to resist electromagnetic interference in the workshop
Equipped with a fault indicator light, it can quickly locate and troubleshoot transmission abnormalities
Original factory standard sealed shell, dustproof and corrosion-resistant process gas
Micro flow sampling adaptation, capable of stable transmission of ultra-low concentration gas signals
Equipped with FabGuard software, real-time data upload, recording, and archiving
Industrial wide temperature design, stable long-term continuous operation of clean workshops
Modular wiring terminals, easy and convenient disassembly, wiring, and maintenance
Multiple overvoltage and electrostatic protection to protect internal signal chips
Small and compact body, saving installation space for vacuum equipment
The same series of INFICON mass spectrometry accessories are universal and interchangeable
ending
INFICON 961-H1MAP has sensitive transmission and complete communication, and is a dedicated signal transmission component for residual gas detection in semiconductor etching and coating chambers.
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