Advanced Energy 3156113-024 RF Generator

Advanced Energy 3156113-024 RF Generator        

Product Details Introduction

Advanced Energy 3156113-024 RF Generator

Advanced Energy 3156113-024 is a specialized RF generator for semiconductor etching and thin film deposition processes, which stably outputs RF energy to excite plasma.

Original factory compatible with multiple semiconductor process chambers, replacement installation does not require significant changes to the circuit

High precision closed-loop power regulation, small output power fluctuations, and uniform plasma state

Real time monitoring of forward and reflected power, rapid suppression of arc occurrence, and protection of cavity components

Built in multiple safety protections for overheating, overcurrent, and standing wave ratio exceeding limits, with automatic shutdown in case of abnormal conditions

Built in high-efficiency heat dissipation duct, controllable temperature rise during long-term full load operation, and less prone to overheating

Supports industrial bus communication, can be remotely set and retrieve power parameters through device master control

The body is equipped with a status display screen and fault code prompts, making fault diagnosis and location efficient

Power off automatically retains commonly used process power parameters, and restarts without the need for repeated configuration

Internal circuit signal isolation, isolating electromagnetic interference caused by vacuum and motor

Modular split structure, easy to disassemble and maintain, damaged parts can be replaced separately

Output waveform clean and low noise, reduce process defects, and improve wafer production yield

Standard cabinet installation dimensions, compatible with mainstream coating and etching equipment cabinet layouts

Whole machine anti-static protection design, suitable for dust-free clean workshop production environment

Endure continuous production operation for 24 hours for a long time, with long-lasting service life of components

After completing the full range calibration of power and standing wave at the factory, it can be put into process production on the machine

Advanced Energy 3156113-024 RF occurrence

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