NIKON X155Y10002-A Precision Optical Components

NIKON X155Y10002-A Precision Optical Components        

Product Details Introduction

NIKON X155Y10002-A Precision Optical Component Product Features

NIKON X155Y10002-A is an original optical path accessory for Nikon lithography machines, which controls the exposure beam and ensures nanometer level imaging accuracy.

Original factory compatible Nikon series exposure machine, directly replace assembly

High purity quartz lenses with high UV transmittance

Nano anti reflective coating reduces beam ghosting and loss

Precision integrated optical path structure, excellent correction of color difference and spherical aberration

Micro scale mechanical adjustment seat, precise optical path calibration

Stable vacuum environment, long-term use without optical drift

Anti laser irradiation, long-term exposure is not easy to age and lose transparency

Fully sealed dust-proof structure, suitable for dust-free clean workshops

Low expansion metal bracket, the optical path does not deform under temperature changes

Integrated beam positioning and detection points for easy debugging

Anti static design to prevent static electricity from damaging the wafer optical path

Modular split structure, easy disassembly and maintenance

Factory optical path calibration, no need for complex calibration on the machine

Resistant to trace process corrosive gases and has a long service life

Matching machine closed-loop control system, linked focusing and exposure

The NIKON X155Y10002-A precision optical component is the core optical path component of lithography machines, which stably improves wafer exposure yield and etching accuracy.

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