YASKAWA XU-ACP4860 Wafer Pre Alignment Machine

YASKAWA XU-ACP4860 Wafer Pre Alignment Machine 

Product Details Introduction

YASKAWA XU-ACP4860 Wafer Pre Alignment Machine Product Features

YASKAWA XU-ACP4860 is compatible with 300mm wafers and is used for pre positioning the center of the semiconductor wafer and the notch on the semiconductor platform.

Specially designed for 300mm standard wafers, compatible with AMAT series equipment

Servo closed-loop control, high accuracy in center and gap positioning

Non contact optical inspection to avoid scratching the wafer surface

High speed scanning recognition reduces the time required for single-chip alignment

Anti static whole machine structure, protecting wafer circuits

Clean grade stainless steel body, suitable for dust-free workshops

Built in vacuum adsorption platform, fixing the wafer without slipping

Multiple fault self check, identifying wafer offset and abnormal adsorption

Equipped with standard communication interface, connected to the main control PLC of the machine

Small and compact body, space saving installation inside the machine

Low vibration operation, does not interfere with surrounding precision components

Multiple safety protections, automatic shutdown alarm for stuck materials

Power off to retain alignment parameters, restart without resetting

Modular components, easy and fast disassembly and maintenance

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