KAWASAKI 3NS004S-C008 Robot Laser Module

KAWASAKI 3NS004S-C008 Robot Laser Module 

Product Details Introduction

KAWASAKI 3NS004S-C008 Robot Laser Module

beginning

KAWASAKI 3NS004S-C008 is a Class 1 laser alignment module specifically designed for Kawasaki Semiconductor wafer robots. It integrates laser detection and chip pre alignment functions and is used for edge positioning correction of silicon wafers, adapting to dust-free wafer transfer equipment.

Class1 safe laser light source, used in dust-free workshops without radiation safety hazards

High precision laser sensing detection with minimal control of chip alignment angle error

Compatible with 300mm standard wafers, compatible with various substrates such as quartz and silicon wafers

High speed alignment calculation, fast completion speed of single chip calibration

Integrated optical path and signal acquisition, compact module structure

Built in photoelectric isolation circuit to isolate electromagnetic interference from robot motors

Multiple static electricity and overcurrent protection to avoid the risk of wafer static electricity damage

Clean grade stainless steel shell, dustproof and corrosion-resistant, suitable for vacuum chamber

Dedicated communication interface, directly connected to Kawasaki wafer robot main control system

Real time output of alignment offset data, coordinated with mechanical arm compensation coordinates

Low power optical path design, long-term continuous operation with low temperature rise

Equipped with a status indicator light, quickly identify laser and sensor faults

Customizable alignment parameters to adapt to different process chip requirements

Standardized buckle installation, disassembly and replacement without disassembling the cavity

Independent channel self-test function, automatically verifies laser output intensity when powered on

ending

KAWASAKI 3NS004S-C008 robot laser module has precise alignment, cleanliness and safety, and is the core component of semiconductor wafer handling robot chip pre alignment.

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