TURBOVAC 361 Turbomolecular Pump

TURBOVAC 361 Turbomolecular Pump   

Product Details Introduction

TURBOVAC 361 is a high-performance turbo molecular pump launched by Leybold in Germany, mainly used to obtain high and ultra-high vacuum environments. It is widely used in fields such as vacuum coating, semiconductor manufacturing, scientific research laboratories, and precision analytical instruments.

Product Features

It can achieve ultra-high vacuum of 10 ⁻¹⁰ mbar level, with high vacuum degree and strong stability, meeting high-end process requirements.

The nitrogen pumping speed reaches 345-400 L/s, with strong pumping ability, fast vacuum pumping speed, and high efficiency.

Adopting a completely oil-free lubrication structure, the vacuum environment is clean and pollution-free, without affecting the quality of samples and processes.

Equipped with magnetic levitation bearings, the rotor has no mechanical contact wear, minimal operating vibration, and long service life.

The water-cooled cooling system is stable and reliable, and can support long-term continuous 24-hour operation without attenuation.

Low operating noise and minimal vibration, especially suitable for precision equipment with high stability requirements.

Supports ISO standard flange interface, strong adaptability, and can quickly connect to various vacuum systems.

Can be installed at any angle, with flexible layout to meet different equipment structures and installation space requirements.

Equipped with comprehensive protection against overheating, overspeed, overload, overcurrent, etc., to enhance the safety of equipment operation.

Paired with a dedicated drive controller, the start stop is smooth, the speed is precise, and the operation and maintenance are easy.

ending

The pump has excellent comprehensive performance, stability, durability, cleanliness and efficiency, and is a classic and reliable core component in high vacuum and ultra-high vacuum systems.

 Product imag

ontroller Module

EMERSON VE4022 Programmable Controller Module
BENTLY 330850-50-00 Front sensor
IC693TCM302B analog input signal

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