Tokyo Electron 3Z80-000604-11 Controller Box

Tokyo Electron 3Z80-000604-11 Controller Box

Product Details Introduction

The Tokyo Electron 3Z80-000604-11 Controller Enclosure/Box is a chassis or enclosure unit used in TEL semiconductor equipment to install and protect control modules and their related electronic components. It not only provides mechanical protection for the controller module, but also is responsible for heat dissipation, dust prevention, and electromagnetic shielding to ensure stable and reliable operation of the control system.

1、 Product functional positioning

Type: Controller Module Shell/Chassis

Main functions:

Protect the internal controller circuit board and electronic components from external mechanical damage, dust, and pollution;

Equipped with a heat dissipation structure to assist in temperature management of the controller and prevent overheating;

Support the installation, fixation, and layout of connection interfaces for control modules;

Provide electromagnetic interference (EMI) shielding to ensure signal stability.

2、 Application Fields

Control System Protection in Semiconductor Manufacturing Equipment

Controller installation box in key process equipment such as etching equipment and deposition equipment;

Ensure the safe and stable operation of control modules in clean rooms and industrial environments.

Maintenance and replacement support for control modules

Easy to disassemble and assemble quickly, supporting equipment maintenance and module replacement;

The structural design complies with the TEL modular specification.

3、 Applicable device platform (example)

TEL device series application scenarios

Fixing and Protection of TEL Unity/Trias Controller Modules

TEL Clean Track series control box for developing, cleaning, and coating equipment

The chassis unit of TEL Indy/Tactra series multifunctional control module

Product imag

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