TEL Tokyo Electron 3208-000029-12 power module
Product Details Introduction
Product Name:
TEL Tokyo Electron 3208-000029-12 power module
(Power Supply Module)
Product type and function:
This module is a dedicated power module in Tokyo Electron semiconductor equipment, mainly responsible for providing stable DC/AC power output for the control circuit, actuator, sensing system, etc. of the equipment. It has the following functional characteristics:
Voltage conversion (such as AC-DC, DC-DC)
Power filtering and voltage stabilization to ensure output voltage stability
Provide protection mechanisms for short circuits, overcurrent, overvoltage, etc
Some versions may support multiple output power supply
Main application areas:
1. Power supply system for semiconductor manufacturing equipment
Power supply for process modules such as Etcher, CVD/PVD, Lithography, etc
Provide low-voltage DC power supply (such as+5V,+12V,+24V) for the main control board, I/O modules, sensors, actuators, etc
2. Control system power core
As the core power source for key modules such as PLC, main controller, and motor driver inside TEL equipment
Support long-term stable operation and adapt to high-precision manufacturing requirements
3. Communication and interface power supply guarantee
Power supply to RS-232/RS-485 interface, optoelectronic isolation module, and network communication module
Ensure that system data transmission is not affected by power fluctuations
4. Vacuum system and actuator support
Power supply for external devices such as vacuum pump control circuit, MFC (Mass Flow Controller), solenoid valve, etc
Capable of anti-interference and high reliability
Product imag

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