TEL Tokyo Electron 2L87-132494-12 servo motor

TEL Tokyo Electron 2L87-132494-12 servo motor

Product Details Introduction

1、 Basic Information

Product model: 2L87-132494-12

Product Name: Servo Motor

Manufacturer: Tokyo Electron Ltd. (TEL)

Product Category: Precision Motor Drive Components

Typical use: Used for automated systems such as wafer handling, positioning, and rotation in TEL semiconductor equipment

2、 Main functions

High precision position control

This servo motor works in conjunction with an encoder to achieve micrometer level position feedback and high-speed dynamic response, used for precise movement of robotic arms, platform slides, and stages.

Closed loop servo feedback system

Equipped with absolute or incremental encoders, the motor status is fed back to the main controller in real-time, ensuring closed-loop control and safety during the motion process.

High reliability and cleanroom adaptability

Adopting low dust materials and sealed structure, it meets the requirements of semiconductor clean environment level and supports 24-hour continuous operation.

3、 Typical application scenarios

Load Port: Control the robotic arm or lifting device to achieve precise placement of wafers.

Coater/Developer: Used for rotating platforms or process chamber positioning mechanisms.

Etching or CVD equipment: Drive gas valve control system or sample injection/extraction moving device.

Automatic alignment system: realizes high-speed alignment, lifting, offset correction and other action control.

Product imag

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