TEL Tokyo Electron 1B80-002788-11 Sensor Board

TEL Tokyo Electron 1B80-002788-11 Sensor Board

Product Details Introduction

1、 Basic Information

Model: 1B80-000226-13

Type: Sensor Signal Acquisition Board/Sensor Input Board

Manufacturer: Tokyo Electron (TEL)

2、 Main functions

Detection signal acquisition: Receive various sensor signals such as temperature, pressure, flow rate, humidity, etc.

Signal conversion: Convert analog signals (such as 4-20mA, 0-10V) or digital signals into a format recognizable by the control system.

Signal isolation and anti-interference: Improve accuracy and stability through optocouplers or isolation amplifiers.

Feedback to the main control unit: Transfer the processed data to the CPU or controller module through the backplane bus or communication bus.

3、 Typical applications

CVD/ALD/Etcher and other process equipment: used to monitor the temperature and pressure of the reaction chamber.

Gas control system: Collect signals from flow meters and pressure sensors to achieve process control.

Temperature control and cooling system: Collect temperature signals from thermocouples/RTDs for closed-loop temperature control systems.

Safety control: By monitoring equipment status through multiple sensors, operational reliability and safety are improved.

4、 Speculate on technical characteristics

Support multiple input signal channels (specific number of channels to be verified)

Interface types may include screw terminals or DIN plugs

Industrial grade isolation design, suitable for clean room operating environment

Compatible with common TEL platforms such as Trias, Unity II, Celesta

Product imag

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