TEL Tokyo Electron 1187-032104-13 Control Unit Module

TEL Tokyo Electron 1187-032104-13 Control Unit Module

Product Details Introduction

TEL Tokyo Electron 1187-032104-13 Control Unit Module

Model: 1187-032104-13

Name: Relay Unit

Manufacturer: Tokyo Electron Ltd. (TEL)

Application equipment: mainly used for TEL semiconductor manufacturing equipment, especially Alpha 8S/a8s series

Function and Function

Circuit switching control: Control the electrical connection between equipment modules by implementing circuit on/off through relays.

Signal transmission: Responsible for the transmission and coordination of internal control signals to ensure the collaborative work of equipment modules.

Protection function: Cut off the circuit in case of abnormal conditions to prevent equipment damage.

Typical application areas

Control of gas flow rate and reaction conditions in chemical vapor deposition (CVD) equipment.

Process control of Etcher equipment.

Accurate gas control of atomic layer deposition (ALD) equipment.

Circuit control and switching in other semiconductor manufacturing equipment.

Product Features

Industrial grade high reliability design, suitable for semiconductor manufacturing environment.

Modular structure, easy to install, maintain, and quickly replace.

Compatible with multiple TEL devices and modules to ensure overall system performance.

Excellent resistance to electromagnetic interference ensures stable signal transmission.

Product imag

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