TEL Tokyo Electron 3M87-024252-23 Controller Module

TEL Tokyo Electron 3M87-024252-23 Controller Module

Product Details Introduction

The TEL Tokyo Electron 3M87-024252-23 controller module is a control core unit module used in semiconductor manufacturing equipment. It is mainly used for unified management, logical operation, and control instruction issuance of various functional modules of the equipment (such as gas system, temperature control system, motion mechanism, etc.), and is a key component for achieving automated precision process control.

1、 Basic Information

Product model: 3M87-024252-23

Product Name: Controller Module

Manufacturer: Tokyo Electron Ltd. (TEL)

Module Type: Embedded Control System Components/Process Control Cards

Applicable platforms: May be used for TEL coating/developer, CVD, Etcher, or ALD systems, etc.

2、 Core functions

Process control

Run TEL device control logic to manage the start stop, switching, timing, synchronization, etc. of each process step.

Peripheral module coordination

Collaborate with I/O board, air valve control board, driver module, temperature control board, etc. to execute logical action control.

Equipment status monitoring and feedback

Real time collection of the operating status of each subsystem, and making judgments, feedback, or alarms based on set conditions.

Communicate with the main system

Interact data with the host or upper system through system buses such as TEL dedicated buses, Ethernet, CAN, etc.

Embedded program running

Internally, it may be equipped with embedded processors and fixed software for executing specific process control programs.

Product imag

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