TEL Tokyo Electron BX81-070100-12 Sensor Board

TEL Tokyo Electron BX81-070100-12 Sensor Board

Product Details Introduction

Product Name: Sensor Board

Product model: BX81-070100-12

Manufacturer: Tokyo Electron Ltd. (TEL)

Component type: Signal acquisition module/sensor interface circuit board

1、 Product Overview:

BX81-070100-12 is a sensor board used internally in Tokyo Electron (TEL) equipment. Its main function is to collect electrical signals from various sensors, perform preliminary processing, amplification, filtering, or conversion, and transmit them to the main control system. It is one of the important links for precision control and state perception of equipment.

This type of sensor board is commonly used to detect key parameters of equipment, such as position, pressure, temperature, airflow, chamber status, etc.

2、 Functional features:

Function type description

Signal acquisition, reception, and processing of external sensor signals (analog or digital)

Signal conditioning includes functions such as filtering, amplification, isolation, and level conversion

Data transmission sends the processed signal to the TEL main control system (such as CPU, control motherboard)

Real time feedback and alarm support for various sensor statuses during process operation through status monitoring

3、 Possible supported sensor types (based on TEL universal design speculation):

Sensor type application instructions

Optoelectronic sensor wafer detection, door switch position judgment

Pressure sensor chamber vacuum pressure detection

Temperature sensor hot plate, heating area temperature control feedback

Displacement sensor control arm or platform position monitoring

Flow sensor for gas or liquid channel flow monitoring

Product imag

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