AMAT 0010-22985 Driver Component

AMAT 0010-22985 Driver Component

Product Details Introduction

AMAT 0010-22985 is a 300mm MCA (Multi Chamber Assembly) heater component produced by Applied Materials, mainly used in processes such as plasma enhanced chemical vapor deposition (PECVD) and physical vapor deposition (PVD) in semiconductor manufacturing.

Main features:

Size: Suitable for 300mm (12 inch) wafers.

Function: Used to fix and heat wafers, ensuring stability and uniformity during processing.

Compatibility: Compatible with various AMAT devices and suitable for different deposition and etching processes.

Application areas:

This heater component is widely used in the semiconductor manufacturing field, especially in the following processes:

PVD (Physical Vapor Deposition): Used in thin film deposition processes, such as the deposition of metal layers.

PECVD (Plasma Enhanced Chemical Vapor Deposition): used for depositing insulating layers, dielectric layers, etc.

Etching process: Provide stable wafer support and heating during the etching process.

Maintenance and replacement:

Due to the operation of this component in high temperature and high-energy environments, long-term use may lead to performance degradation. Regular inspection and replacement of heater components are crucial for maintaining equipment performance and production efficiency.

Product imag

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