Gasonics 95-4477 Stripping Module

Gasonics 95-4477 Stripping Module

Product Details Introduction

The Gasonics 95-4477 stripping module is a plasma ashing equipment module commonly used in semiconductor manufacturing processes. It is a key component in Gasonics plasma systems and is mainly used to remove photoresists and other organic residues.

1、 Product Overview

The Gasonics 95-4477 stripping module is the core functional component of Gasonics' plasma stripping equipment, usually installed in the plasma reaction chamber (ash chamber), responsible for stable ashing, cleaning and other operations in the plasma environment. This module has characteristics such as high temperature resistance, corrosion resistance, and uniform distribution of plasma.

2、 Application Fields

Semiconductor Manufacturing

Used for removing photoresist during wafer processing

Remove etching residues, clean the surface, and ensure the accuracy of the next process step

Integrated Circuit (IC) Packaging Process

Removing organic residues before IC packaging to improve packaging quality

Manufacturing of Micro Electro Mechanical Systems (MEMS)

During the release process of MEMS structures, a stripping module is used to remove sacrificial layer materials

Flat Panel Display (FPD) Manufacturing

Remove residual adhesive from the display panel after photolithography to improve yield

Manufacturing of solar cells

Ashing treatment of silicon wafer surface to improve subsequent metallization contact performance

Compound semiconductor manufacturing (such as GaAs, SiC, GaN, etc.)

Peel off the organic layer on the surface of the material to ensure high-quality interface cleanliness

Product imag

Related website links

IC3600SPRB1 Gas Turbine Contro

ASEA ES1211 module board

ABB UN0807C-P Programmable Controller

Other website links

ABB GFD563A102 励磁系统

ASEA SNAT-7902逆变器

ASEA AE-6003脉冲发生器