TEL Tokyo Electron 3281-000138-12 Control Board

TEL Tokyo Electron 3281-000138-12 Control Board

Product Details Introduction

Product Name: 3281-000138-12 Control Board

Manufacturer: Tokyo Electron (TEL)

Product Type: Electronic Control Board Module

1、 Product Overview

The 3281-000138-12 control board is one of the control core components used in Tokyo electronic semiconductor equipment, mainly responsible for equipment logic control, signal processing, and communication coordination functions.

2、 Main functions

Control the operation process of equipment, such as switch control, action coordination, etc.

Receive and send digital/analog signals to achieve real-time control of on-site sensors and actuators.

Communicate with the upper system or main control computer to exchange status and parameter data.

Support device parameter setting, fault feedback, alarm linkage and other functions.

3、 Applicable equipment (may include)

TEL dry etching equipment

TEL PVD/CVD thin film deposition equipment

TEL coating and developing equipment (Coater/Developer)

TEL polishing equipment (such as CMP), etc

4、 Technical characteristics (reference for general control board)

Input voltage: commonly 24V DC

Interface types: RS-232, 485, digital IO, analog IO (depending on version)

Processor: Embedded controller or FPGA

Installation method: Rack mounted slot or independent fixed installation

Communication support: may support TEL proprietary communication protocol

Product imag

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