TEL CX81-050024-V2 PCB Control Board
Introduction
TEL CX81-050024-V2 PCB Control Board
Introduction: TEL CX81-050024-V2 is a dedicated main control PCB board for Tokyo Electronic Semiconductor process equipment, which coordinates cavity signal acquisition and process logic control, and is compatible with wafer etching and deposition equipment.
Multi channel signal acquisition, docking with temperature, vacuum, and limit sensors of various types
Onboard optoelectronic isolation circuit to isolate RF electromagnetic signal interference
Multi layer shielded PCB wiring reduces cavity clutter interference
Built in hardware interlock protection, automatically cutting off process output in case of abnormal conditions
Original factory standard plug-in card structure, easy disassembly and replacement of cabinets
Exclusive device communication protocol, no debugging required for docking with the main control of the entire machine
Local storage of process formulas, without loss of power-off parameters
Multiple digital IO channels, controlling air valves, heating, and RF units
Equipped with a status indicator light, quickly locate the fault point of the circuit
Clean grade industrial components, suitable for dust-free wafer workshops
0-50 ℃ wide temperature range, supporting 24-hour continuous mass production of equipment
Triple hardware protection design for overvoltage, overcurrent, and short circuit
Low latency data transmission, multi cavity action synchronization without deviation
Standardized terminal layout, firm and not easily loose wiring
Compatible with TEL series etching and thin film deposition equipment
Conclusion: TEL CX81-050024-V2 is a semiconductor cavity core control board that stably controls the entire wafer process flow.
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