VAT A-3000089 Integrated Pressure Controller

VAT A-3000089 Integrated Pressure Controller        

 Introduction

VAT A-3000089 Integrated Pressure Controller Product Features

Introduction: VAT A-3000089 is a specialized integrated pressure controller for semiconductor vacuum chambers, integrating measurement and control to accurately and stably control the vacuum pressure inside the chamber.

Built in high-precision vacuum sensing unit with small pressure detection error

Integrated PID closed-loop control, automatic voltage stabilization to suppress pressure fluctuations

Suitable for semiconductor etching, coating cavity vacuum process scenarios

Built in multiple protections, automatic alarms for overpressure, overcurrent, and wire breakage

Metal shielding shell, resistant to electromagnetic interference from RF power supply

Standard equipment communication interface, connected to the main control system of the whole machine

Integrated valve body and control module, saving installation space

Clean grade sealed structure, suitable for dust-free wafer workshops

Real time pressure numerical feedback, data transmission without delay

Modular structure, convenient for troubleshooting and replacement of parts

Wide temperature operating range, supporting 24-hour continuous production of equipment

Multi gear pressure regulation mode, adapted to different process requirements

Original factory specific communication protocol, no need for complex debugging on the computer

Corrosion resistant medium pathway, suitable for various process special gases

Equipped with fault code display, quickly locate equipment abnormalities

Conclusion: VAT A-3000089 vacuum control has high precision and strong durability, and is the core pressure control component of semiconductor vacuum processes.

Product imag

ontroller Module

 CS31ICSO16N1 Analysis Input/Output Module
INDRAMAT TDM3.2-20-300-W0 servo controller
Kongsberg RSER200-4 Input Module

Other website links

Schneider TM251MESE可编程控制器
EMERSON KJ4110X1-BA1 模拟输出模块
prosoft 5202-DFNT-MCM4伺服冗余系统