Introduction
DAIHEN MDC-01C-V Control Box Product Features
Introduction: DAIHEN MDC-01C-V is a dedicated control box for semiconductor RF power supply, which controls plasma power output and is compatible with wafer coating and etching equipment.
Accurate regulation of RF output power with minimal power fluctuations
Real time collection of chamber load data, automatic impedance adaptation
Built in multiple safety protections for overcurrent, overheating, and short circuit
Metal shielding box to resist electromagnetic interference in the workshop
Standard equipment communication interface, connected to the main control of the whole machine
Modular internal layout, easy maintenance and replacement of parts
Local storage of process parameters, no loss of power-off data
Built in fault self check, quickly display abnormal codes
Clean grade internal components, suitable for dust-free workshops
Integrated heat dissipation duct, 24-hour continuous and stable operation
Standardized wiring terminals, orderly and anti loosening circuit layout
Original factory matching communication protocol, no additional debugging required
Compact cabinet design, saving cabinet installation space
Low harmonic signal output, does not interfere with surrounding precision components
Matched with Daheng's entire range of RF power supplies, the overall compatibility is high
Conclusion: DAIHEN MDC-01C-V serves as the core control unit of the RF system, ensuring stable production of semiconductor plasma processes
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