TEL 3D80-000142-V8 RF automatic matching machine

TEL 3D80-000142-V8 RF automatic matching machine        

 Introduction

TEL 3D80-000142-V8 RF Automatic Matching Machine Product Features

beginning

The TEL 3D80-000142-V8 RF automatic matching machine is a specialized RF impedance matching module for semiconductor etching and thin film processes. It is compatible with original plasma equipment and can optimize RF transmission status in real time to ensure stable wafer processing technology.

Equipped with high-speed real-time impedance detection algorithm, quickly capture cavity load impedance fluctuations

Automatically adjust matching loop parameters to significantly reduce RF reflection power

High energy coupling efficiency, reducing RF power loss, and lowering production energy consumption

Built in multiple overload protections to prevent breakdown and damage of RF power supply and cavity components

Fast matching response speed, no manual debugging required for process switching

Adapt to standard 13.56MHz industrial RF frequency, compatible with multiple power ranges

All metal enclosed heat dissipation structure, controllable temperature rise during long-term continuous operation

Standardized industrial communication interface, seamlessly compatible with TEL whole machine control system

Wide range of impedance adaptation, suitable for load changes caused by different process gases

Stable plasma output improves the uniformity and consistency of thin film deposition and etching

Modular compact body, easy disassembly, maintenance and replacement of the machine

Equipped with built-in operation data collection function, real-time feedback of standing wave and power parameters

Anti electromagnetic interference design ensures stable operation in complex RF environments in the workshop

Support pulse RF process mode, matching effect without hysteresis offset

Original precision component assembly, long equipment service life, low failure rate

ending

The TEL 3D80-000142-V8 RF automatic matching machine, with its advantages of fast matching, high stability, and easy maintenance, is a reliable RF matching core component for semiconductor plasma processes.

Product imag

ontroller Module

EMERSON IPMC761-002 Input/Output Module
ICS TRIPLEX T9851 Controller Module
ICS TRIPLEX T9831 extender interface

Other website links

Prosoft RLX2-IFH24E 以太网关模块
TRICONEX PLM3900N模拟量输入模件
bently 1900/65A-00-00-01-00-00振动监测器

SC723A001	6SC6100-0NA21	6ES5-456-7LA11
SC723	SC452-047-05	SCE905AN-001-01
SC722B-001	SC723B00101	SCE904AN-001-01
SC722A-001-PM72036	SC453-002-15	SCE905-001-01 A
SC722A-001-PM72012	SC722A001	SCE904AN-002-01
SC722A-001-PM72005	OS63D12 fuse switch	SCE952NN-504-01