RFVII RF-1-MINI-CB RF Generator

RFVII RF-1-MINI-CB RF Generator        

Product Details Introduction

RFVII RF-1-MINI-CB RF Generator

Introduction: This small RF generator is designed to supply power for semiconductor cavity plasma processes, providing stable output of high-frequency RF energy.

Compact body, easy to install and arrange in a small space of the machine

Standard industrial RF frequency point, uniform and stable plasma excitation

Power infinitely adjustable, suitable for various etching and cleaning processes

Built in impedance matching circuit to reduce reflected power loss

Closed loop power feedback, small output fluctuations, high process consistency

Equipped with a communication interface, it can be remotely controlled by the device's main controller

Multiple protection circuits, automatic shutdown for over temperature, over current, and standing wave anomalies

Panel status indicator light, quickly identify various operational faults

Air cooled cooling structure, supporting 24-hour uninterrupted production line operation

Low electromagnetic interference design, does not affect surrounding precision sensing components

Free switching between pulse/continuous output modes

Standardized wiring ports, convenient and time-saving disassembly and maintenance

Wide voltage input, suitable for domestic and foreign factory power supply environments

Reinforced structure of the whole machine, resistant to workshop vibration and less prone to failure

Suitable for small vacuum chambers and laboratory plasma equipment

Conclusion: RF-1-MINI-CB is a compact and stable RF core spare part for small vacuum processes

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