AMAT 0015-09077 Throttle Valve Driver

AMAT 0015-09077 Throttle Valve Driver        

Product Details Introduction

AMAT 0015-09077 Throttle Valve Driver

Introduction: AMAT 0015-09077 is a semiconductor equipment specific throttle valve drive unit that precisely controls the opening of vacuum pipeline valves.

AMAT 0015-09077 is compatible with the original vacuum throttle valve and has no compatibility issues

High precision valve opening adjustment, stable control of chamber vacuum degree

AMAT 0015-09077 has built-in position feedback and real-time feedback of valve position data

Support linear and equal percentage multiple flow adjustment curves

AMAT 0015-09077 has multiple protections for overcurrent, overload, and overheating

Fast response speed, quickly adjust valve opening during vacuum fluctuations

AMAT 0015-09077 is equipped with a standard communication interface to interface with the machine's main control system

Equipped with a fault indicator light, the abnormal status is displayed intuitively for easy maintenance

AMAT 0015-09077 is resistant to dust and corrosion, suitable for harsh working conditions in wafer manufacturing processes

Support segmented limit setting to prevent damage to valve body caused by valve overtravel

AMAT 0015-09077 low electromagnetic interference, does not affect precision detection signals

Small integrated body, easy to install in the narrow space inside the machine

AMAT 0015-09077 supports 24-hour uninterrupted continuous operation

Original factory standardized wiring terminals, easy and fast disassembly and maintenance

AMAT 0015-09077 is compatible with various vacuum process chambers for etching and deposition

Conclusion: AMAT 0015-09077 has stable voltage control and complete protection, and is a standard throttle drive spare part for semiconductor vacuum systems.

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