AMAT 0190-B9760 Vacuum Controller

AMAT 0190-B9760 Vacuum Controller        

Product Details Introduction

AMAT 0190-B9760 Vacuum Controller Product Features

AMAT 0190-B9760 is a dedicated vacuum control unit for semiconductor equipment, which accurately controls the vacuum degree of the cavity and is suitable for coating and etching processes.

Original factory compatible Endura and Centura series machines, directly replaced and installed

High precision pressure acquisition, real-time capture of small vacuum fluctuations

PID closed-loop control, quickly stabilize the target vacuum value of the cavity

Multi channel vacuum gauge signal access, synchronous monitoring of multi chamber pressure

Signal isolation circuit to resist radio frequency electromagnetic interference

Multiple protections for overvoltage, ultra vacuum, and sensor disconnection

Onboard fault indicator light, quickly locate vacuum abnormalities

RS485 bus communication for remote monitoring of equipment master control

Power off to retain process vacuum parameters, no need to readjust when restarting

Modular version of standard cabinet, easy disassembly and maintenance

Industrial wide temperature operation, long-term stable operation of clean workshops

Independent signal channel, single channel failure does not affect the entire machine

Low latency signal output, fast response of vacuum valve adjustment

Factory calibration and calibration, ready for mass production on the machine

Corrosion resistant PCB material, resistant to process trace corrosive gases

The AMAT 0190-B9760 vacuum controller is a core component of semiconductor vacuum systems, ensuring constant pressure in the plasma process chamber.

Product imag

ontroller Module

Motorola MVME167-33B Industrial Control System
HONEYWELL SC-UCMX01 51307195-175 Hybrid I/O Module
PCO 51303940-250 9967296 Fan Alarm Component

Other website links

REXROTH VT-VPCD-1-16/V0/1-P-1 R901089559放大器模块
Woodward  9907-1183涡轮控制模块
T3N225断路器