LOGOSOL LPA812-3-V76C1 pre aligner

LOGOSOL LPA812-3-V76C1 pre aligner 

Product Details Introduction

LOGOSOL LPA812-3-V76C1 Pre Aligner Product Features

LOGOSOL LPA812-3-V76C1 is a specialized integrated pre alignment equipment for semiconductor 200/300mm wafers, which quickly completes wafer center and notch positioning.

Integrated whole machine, no need for external controller, simple wiring

Low inertia brushless motor, smooth operation and fast response speed

CCD non-contact optical scanning, without damaging the wafer surface

Compatible with various types of wafers including transparent, semi transparent, and opaque

Switching wafer specifications without adjusting mechanical structure

Short single alignment cycle, improving overall production capacity of the production line

High positioning repeatability and minimal angle offset error

Vacuum+positioning pin dual fixing method, the wafer does not slip

Compliant with Level 1 cleanliness standards and suitable for cleanroom environments

Support dual communication of network port and RS232, and interface with the main control of the machine

The whole machine is equipped with anti-static structure to prevent static damage to the wafer

Built in hardware self-test, automatic alarm for adsorption and motor faults

Compact body, space saving installation inside the machine

Low vibration operation, does not interfere with surrounding precision components

Long life industrial components with long production and maintenance cycles

The LOGOSOL LPA812-3-V76C1 pre aligner is widely compatible with etching, coating, and lithography equipment, and is the core unit for wafer transfer positioning.

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