NIHON KOSHUHA AMC-T20-V-V RF Controller

NIHON KOSHUHA AMC-T20-V-V RF Controller 

Product Details Introduction

NIHON KOSHUHA AMC-T20-V-V RF Controller Product Features

NIHON KOSHUHA AMC-T20-V-V is a dedicated RF control unit for semiconductor plasma equipment, which accurately controls RF output power and is compatible with etching and coating processes.

Suitable for 2.45GHz RF frequency band, stable and controllable output power

Fast power regulation response, uniform plasma discharge

Real time detection of reflected power and suppression of arc interference process

Built in multiple protections, automatic shutdown due to overheating and over reflection

Comes with fault code prompts, high efficiency in maintenance and troubleshooting

Standard industrial communication interface, compatible with machine PLC

Power off to save process parameters, restart without the need for repeated settings

Compact modular body, easy disassembly and replacement of cabinets

Optimized heat dissipation for the entire machine, making it less prone to high temperatures when fully loaded for extended periods of time

Anti electromagnetic interference circuit, suitable for complex working conditions in clean workshops

High precision power sampling with minimal output fluctuation amplitude

Standard 24V industrial power supply, stable operation due to voltage fluctuations

Independent signal isolation circuit to avoid signal interference with each other

Plug in terminal block, easy to maintain and operate wiring

Original factory matching TEL series semiconductor process equipment

The NIHON KOSHUHA AMC-T20-V-V RF controller is the core control component of the RF power supply, ensuring the continuous stability of the semiconductor plasma process.

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