ASYST 05050-014 Pre aligner

ASYST 05050-014 Pre aligner 

Product Details Introduction

ASYST 05050-014 Pre aligner

Introduction: ASYST 05050-014 is a specialized pre alignment unit for semiconductor wafer transfer equipment, used for wafer positioning correction.

CCD optical detection accurately identifies wafer notches and edge positions

Micron level positioning accuracy to avoid mechanical arm picking and bumping the wafer

Built in LED light source, supporting automatic calibration of light path for devices

High speed rotation positioning reduces the cycle time of wafer loading and unloading

All metal sealed shell, suitable for dust-free clean workshop environment

Low friction support platform reduces the risk of wafer surface scratches

Integrated signal feedback interface, real-time upload of alignment status

Built in multiple anti-collision detection, automatic shutdown protection for abnormal wafers

Compact modular structure, easy disassembly and assembly of machine cabinets

Anti electromagnetic interference design, suitable for etching and coating peripheral equipment

Low noise servo rotation, stable long-term continuous operation

Standardized communication interface, directly connected to EFEM whole machine control system

Wear resistant optical lenses, less prone to dust adhesion, long maintenance cycle

24V standard industrial power supply, low power consumption and low heat generation of the whole machine

Compatible with the same series of ASYST wafer handling robot systems

Conclusion: ASYST 05050-014 has precise positioning and complete protection, and is the core alignment component of wafer transfer systems.

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