VAT 09040-PE44-AOF high-pressure gate valve

VAT 09040-PE44-AOF high-pressure gate valve 

Product Details Introduction

Product Features of VAT 09040-PE44-AOF High Pressure Gate Valve

Introduction: VAT 09040-PE44-AOF is a pneumatic high-pressure gate valve specifically designed for semiconductor vacuum equipment, suitable for controlling the on/off of vacuum pipelines in etching and coating machines.

Original dual acting pneumatic drive, compatible with 6-9bar standard clean compressed air supply

Stainless steel integral valve body, resistant to acid and alkali process gas corrosion, suitable for dust-free workshops

Ultra low leakage rate sealing structure, valve body leakage rate meets ultra-high vacuum working condition standards

Built in protective ring to prevent dust deposition, reduce gate fouling, and extend maintenance cycle

Differential pressure opening and closing design, capable of smooth opening without jamming under a maximum pressure difference of 1 bar

FKM temperature resistant seal, valve body can withstand up to 150 ℃ process high temperature environment

Straight through large-diameter flow channel, low airflow resistance, high vacuum pumping efficiency

Integrated position feedback signal, real-time transmission of valve fully open/closed status

Bellows isolation transmission structure to prevent grease contamination of the vacuum chamber

Wedge gate self-cleaning structure, automatically scrapes off surface sediment when opening and closing

Standardized ISO-F flange interface, disassembly and replacement do not require pipeline modification

Anti RF electromagnetic interference, suitable for installation around the RF power supply of the machine

Low wear moving parts, with hundreds of thousands of cycles of opening and closing, are not prone to failure

Equipped with original electromagnetic valve module, simple wiring can be directly connected to the equipment main control

Bidirectional sealed flow, both positive and negative installation of pipelines can stably isolate vacuum

Conclusion: VAT 09040-PE44-AOF has reliable sealing and process corrosion resistance, and is a mainstream isolation gate valve accessory for semiconductor vacuum production lines.

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