AMAT 0190-B6280 Gate Valve

AMAT 0190-B6280 Gate Valve 

Product Details Introduction

AMAT 0190-B6280 Gate Valve

Introduction: AMAT 0190-B6280 is a semiconductor vacuum chamber specific gate valve with good sealing performance, suitable for wafer process vacuum pipelines.

High vacuum sealing structure with extremely low leakage rate

Corrosion resistant valve body material, suitable for various process gases

The opening and closing actions are smooth, without severe impact or vibration

Pneumatic drive design, fast switch response speed

Built in position sensing, real-time feedback of valve status

Multiple dust-proof seals to reduce particle contamination of wafers

High temperature resistant valve plate, suitable for high-temperature process chambers

Standard flange size, directly replace valves of the same specification

Equipped with interlocking signals and linked equipment safety circuits

Low wear seals extend overall service life

Compact appearance, space saving installation inside the device

Simple modular structure, easy disassembly and maintenance

Resistant to chemical corrosion, resistant to etching exhaust gas erosion

Double safety limit to prevent valve damage due to overtravel

Factory vacuum leak detection, unified and stable factory sealing

Conclusion: AMAT 0190-B6280 has reliable sealing and high cleanliness, and is a key on/off component for semiconductor vacuum systems.

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