EDWARDS STP-H1303CV3 Turbomolecular Pump

EDWARDS STP-H1303CV3 Turbomolecular Pump 

Product Details Introduction

EDWARDS STP-H1303CV3 Turbomolecular Pump

Introduction: EDWARDS STP-H1303CV3 is a specialized turbo molecular pump for Edward Semiconductor, with stable pumping and suitable for vacuum wafer equipment.

High pumping speed design, quickly establishing a high vacuum environment

Integrated rotor blades with high compression efficiency

Low vibration operation, does not affect precision processes

Built in temperature control and heat dissipation, stable under full load for a long time

Composite bearing structure, longer service life

Low dust output, suitable for dust-free workshops

Integrated driver circuit, no need for additional drivers

Standard communication interface, capable of linking with the upper computer of the device

Multiple fault self check, intuitive and easy to check abnormal codes

Overload and overtemperature automatic shutdown protection pump body

Compact pump body, cabinet installation saves space

Corrosion resistant internal material, compatible with process exhaust gas

Fast start stop speed, reducing standby preparation time

Low operating noise, improving workshop conditions

Original factory standardized flange, easy disassembly and replacement

Conclusion: EDWARDS STP-H1303CV3 has excellent vacuum performance and simple operation and maintenance, making it the core pump component of semiconductor vacuum systems.

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