NOVELLUS 02-425998-00 Robot Controller
Product Details Introduction
NOVELLUS 02-425998-00 Robot Controller
Introduction: NOVELLUS 02-425998-00 is a specialized controller for semiconductor wafer transfer robots, which controls smoothly and adapts to coating equipment. Its core features are as follows:
Closed loop servo control, high positioning accuracy of robotic arm
S-shaped acceleration and deceleration algorithm reduces the risk of wafer fragmentation during wafer handling
Multi channel isolated IO interface, compatible with limit and vacuum sensors
Circuit board electromagnetic shielding, dust-free workshop anti-interference and stable operation
DC wide voltage input, uninterrupted operation due to power supply fluctuations
Multiple safety protection mechanisms for collision, overload, and overheating
Built in multiple handling programs, allowing for quick switching between different processes
Support teaching box operation, simple point editing and debugging
Block modular board, fast fault replacement and maintenance speed
Multi axis synchronous linkage, compatible with telescopic wafer manipulator
Whole machine self check function, quick troubleshooting of fault codes
Metal dustproof shell, suitable for installation in equipment enclosed cabinets
Industrial communication port, capable of connecting to the central control system of the production line
Low heat generation and low power consumption, supporting continuous operation 24 hours a day
Match multiple NOVELLUS thin film deposition equipment, with good versatility for replacement
Conclusion: NOVELLUS 02-425998-00 is a safe, stable, and easy to debug and maintain core control component for semiconductor wafer transfer robots.
Product imag

ontroller Module
Applied Materials 0010-44213 Wafer Lift Assembly
IC610MDL179 output module
TERASAKI ESM-103J Starter Module
Other website links
REF610C11HCNR01 继电器
RDCU-12C 3AUA0000036521控制板
RPBA-01 C2500843通信模块
| IC3600SFUA1C | 6DD1682-0BC3 | IC3600SSVD1 |
| IC3600SFUA1 | 6DD1682-0BC0 | IC3600SSVB1B |
| IC3600SFPB1B1C | 6DD1683-0CC0 | IC3600SSVB1 |
| IC3600SFPB1B | 6DD1683-0BE5 | IC3600SSVA1F1C |
| IC3600SFPB1 | 6SC6504-0AF01 | IC3600SSVA1 |
| IC3600SFKK1 | 531X300CCHALM3 | IC3600SSLD1H1D |
| IC3600SFKD1C | IC3600SSLD1F1B |