AMAT 0190-34645W Generator

AMAT 0190-34645W Generator 

Product Details Introduction

AMAT 0190-34645W Generator

Introduction: AMAT 0190-34645W is a semiconductor cavity specific RF plasma generator with stable power output, suitable for thin film and etching process machines. Its core features are as follows:

High precision output power regulation, stable and controllable plasma state

Low ripple RF output ensures wafer process uniformity

Built in automatic impedance matching to reduce power reflection loss

Wide range mains power input, grid fluctuations do not affect operation

Equipped with multiple protections including overcurrent, overvoltage, overtemperature, and standing wave

Integrated heat dissipation duct, not prone to high temperatures when fully loaded for a long time

Metal shielding shell, isolating electromagnetic interference in the workshop

Real time power monitoring, intuitive display of operating data

Standard rack plug-in, easy to disassemble, replace and maintain

Compatible with the entire range of AMAT Centura and Endura process equipment

Built in fault self check, quick identification of fault codes to locate problems

Supports industrial communication and can be integrated with production line control systems

High and low temperature tolerance, long-term continuous operation of enclosed cabinets

High conversion efficiency and lower energy consumption for long-term operation

Multiple sets of power program storage, one click switching between different processes

Conclusion: AMAT 0190-34645W is a semiconductor vacuum chamber core RF power generator with complete protection and strong process adaptability.

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