DAIHEN 2L39-000154-V2 Transformer

DAIHEN 2L39-000154-V2 Transformer 

Product Details Introduction

DAIHEN 2L39-000154-V2 is a specialized RF transformer for semiconductor equipment, used as an RF matching device for TEL etching/deposition equipment (such as RMN/AMN series), belonging to high-frequency, high-voltage, low loss precision components.

Core features (15 points)

Model positioning: 2L39-000154-V2, DAIHEN original factory, semiconductor RF matching core component.

Equipment adaptation: Dedicated to TEL (Tokyo Electronics) 300mm wafer etching/deposition platform.

Function purpose: Internal impedance transformation, voltage boosting, and isolation of RF matching device to ensure stable transmission of RF power.

Operating frequency: Suitable for 13.56MHz industrial RF and semiconductor standard frequency.

Power level: Suitable for 5-10kW RF power supply, medium to high power process scenarios.

Winding material: oxygen free copper coil+high-frequency magnetic core, low skin effect, low loss.

Insulation grade: Class H (180 ℃), resistant to high temperature and high-frequency voltage shock.

Structural design: Sealed encapsulation+shielded shell, anti-interference, dust-proof, suitable for clean rooms.

Input/Output: High voltage side/low voltage side impedance matching design, suitable for RF generator and cavity load.

Cooling method: Water cooling/air cooling is optional, suitable for long-term high load operation.

Cleanroom compatibility: SEMI S2/S8 certification, available for Class 1 cleanrooms.

Protection mechanism: Over temperature, over-current, over-voltage, RF reflection protection, suitable for harsh semiconductor operating conditions.

Long life design: Industrial grade components, MTBF>600000 hours, 7 × 24-hour operation.

Installation method: Embedded installation in the cabinet, compatible with standard RF adapter size.

Maintenance features: modular and replaceable, quick fault replacement, reducing downtime.

summary

DAIHEN 2L39-000154-V2 is a key power conversion component for semiconductor RF process equipment, with high frequency precision, low loss, clean room adaptation, and long lifespan as its core. It is stable, reliable, and highly adaptable.

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