AMAT 0190-27355R Low Temperature Pump

AMAT 0190-27355R Low Temperature Pump 

Product Details Introduction

The AMAT 0190-27355R cryogenic pump is a specialized refrigeration vacuum equipment for semiconductor high vacuum processes, suitable for harsh processes such as etching and deposition, with high cleanliness, high pumping speed, and optimized design for regeneration. The following are its core characteristics.

Original AMAT 0190-27355R model, specially designed for semiconductor equipment matching.

Closed cycle G-M refrigeration, no need for liquid nitrogen, low operating cost.

Secondary cold head design, with a low temperature of up to 10K and high ultimate vacuum degree.

Oil free vacuum environment, avoiding oil pollution, suitable for clean processes.

High pumping speed design, with high efficiency in removing water vapor and light molecular gases.

Built in activated carbon adsorption layer effectively captures difficult to condense gases.

All metal sealed structure, leak resistant, and good vacuum retention.

Special low-temperature resistant material, which does not deform or become brittle under long-term low-temperature conditions.

Integrated anti vibration structure, adapted to the vibration environment of semiconductor equipment.

The R version optimizes the regeneration process, allowing for faster recovery of air extraction after heating and analysis.

Equipped with fault diagnosis, monitoring the cold head temperature, vacuum degree, and operating status.

Standard interface, seamlessly integrated with AMAT equipment control system.

Low power operation, with better energy efficiency than traditional diffusion pumps.

Compliant with SEMI standards, with original factory quality and strong compatibility.

Compact structure, easy installation and maintenance, suitable for cleanroom layout.

In summary, the AMAT 0190-27355R cryogenic pump meets the core requirements of semiconductor ultra-high vacuum processes with high cleanliness, high pumping speed, fast regeneration, and high stability.

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Other website links

  ACS-RTAC-01 64610805接口模块
BENTLY 3500/33 149992-01 输入输出模块
ICS T9110 处理器模块