TEL Tokyo Electron 3380-007053-13 Single Board Computer
Product Details Introduction
TEL Tokyo Electron 3380-007053-13 Single Board Computer
(Single Board Computer, SBC)
Product Features:
This single board computer is the core computing and control platform in Tokyo Electron semiconductor equipment, integrating a processor, memory, storage, and input/output interfaces. Its main functions include:
Run the software and firmware of the equipment control system to achieve process management
Collect and process device sensor data to achieve closed-loop control
Responsible for communication and coordination with various sub modules of the equipment (I/O board, driver module, sensor module, etc.)
Provide network interfaces to enable interaction with upper computer systems or factory manufacturing execution systems (MES)
Support real-time operating systems (RTOS) or embedded Linux and other operating environments
Main application areas:
1. Core control of semiconductor manufacturing equipment
As the main control platform for Etcher, CVD, PVD and other equipment
Control process parameters, equipment actions, data collection and recording
2. Automation and Process Management
Execute device action sequence and process logic
Support device self diagnosis, fault handling, and alarm management
3. Data communication and network interface
Exchange data with factory automation systems and manufacturing execution systems (MES)
Supports multiple communication protocols such as industrial Ethernet, serial port, CAN bus, etc
4. Equipment status monitoring and optimization
Real time monitoring of device operation status, supporting remote maintenance and upgrades
Provide system logs, historical data storage and analysis interfaces
Product imag

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