TEL Tokyo Electron CT2980-092273-11 Sensor Module

TEL Tokyo Electron CT2980-092273-11 Sensor Module

Product Details Introduction

TEL Tokyo Electron CT2980-092273-11 Sensor Module

（Sensor Module）

Product definition and functionality:

This module is a high-precision sensor integrated unit used by Tokyo Electron in its semiconductor equipment for real-time monitoring of equipment operating status or processing environment parameters. Its core functions include:

Detection and collection: Monitor key physical quantities (such as position, temperature, pressure, vacuum degree, flow rate, alignment status, etc.)

Signal conversion: Convert analog signals into digital signals and transmit them to the control system

Data feedback: Provide real-time feedback for closed-loop control and equipment protection

Integrated communication: communicates with the main control system, PLC or I/O module, supports internal logical linkage of equipment

Main application areas:

1. Wafer processing monitoring

Used for detecting the position and status of wafers during transportation, loading, alignment, and other processes

Frequently used in conjunction with EFEM, Load Port, and Transfer Module to improve operational accuracy and stability

2. Vacuum/gas control system

Monitor the vacuum degree, gas flow rate, or pressure changes inside the chamber

Linkage with MFC (Mass Flow Controller), vacuum valve and other equipment to achieve safety interlock control

3. Temperature and environmental monitoring

Temperature detection for heating modules, cooling devices, or plasma processing areas

Ensure that the process parameters operate within a stable range

4. Automated fault diagnosis and alarm

Implement fault state detection (such as door not closed, alignment failure, abnormal air pressure)

Support device self check, remote alarm, and logging functions

Product imag

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