TEL Tokyo Electron 3M81-005973-14 Input/Output Module

TEL Tokyo Electron 3M81-005973-14 Input/Output Module

Product Details Introduction

Introduction to TEL Tokyo Electron 3M81-005973-14 Input/Output Module

1、 Basic Information

Product model: 3M81-005973-14

Name definition: Input/Output Module (I/O Module) or SFLUX-AMP PCB (Signal Amplification Board)

Manufacturer: Tokyo Electron Ltd. (TEL)

Applicable equipment: Semiconductor process equipment, such as CVD, Etcher, Coater/Developer and other platform control systems

2、 Function and Function

Signal input/output interface

Receive and output digital or analog signals for establishing communication channels with field devices such as sensors, actuators, solenoid valves, etc.

Signal amplification and shaping

Integrated with signal amplification circuit (SFLUX-AMP), it can enhance or filter the input signal to improve signal quality and stability.

Electrical isolation function

Possible isolation circuit design can help suppress electromagnetic interference and protect the stable operation of the upper control system.

Modular integration

It can be combined with CPU modules, relay control boards, power modules, etc. to form a complete control system, making it easy to replace and maintain.

3、 Typical application areas

Gas supply system: Control the opening and closing of gas valves and collect sensor status.

Temperature control and process unit: Input analog signals such as temperature and pressure, and output control commands.

Automated handling system: interacts and controls with equipment such as robotic arms, lifting platforms, and conveyor belts.

Vacuum or cleaning equipment: feedback on chamber pressure, door status, water and gas switch status information.

4、 Product features (inferred based on the design characteristics of TEL input/output module)

Supports multi-channel input and output, compact structure

Compatible with TEL device dedicated backboards or slots

High quality circuit board, suitable for clean rooms and complex environments

The installation method is standard industrial card components, which can be hot swappable and replaced

Equipped with anti-interference and high reliability design, suitable for 7 × 24-hour operation scenarios

Product imag

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