TEL Tokyo Electron 3D81-000039-V1 Controller Board
Product Details Introduction
Product model: TEL Tokyo Electron 3D81-000039-V1
Product type: Controller Board
Functional positioning: The core control module in semiconductor manufacturing equipment, responsible for executing equipment logic control and signal management
1、 Product Function Overview:
The 3D81-000039-V1 controller board is a highly integrated control module developed by Tokyo Electron (TEL) for semiconductor devices. This board is mainly responsible for processing equipment action instructions, signal acquisition and distribution, process flow management, and coordinating communication between subsystems. It is an important component of the equipment automation control system.
2、 Main application areas:
Main control system for semiconductor manufacturing equipment
Used in etching machines, deposition equipment, cleaning machines, and diffusion furnaces to control various actuators such as valves, solenoid valves, motors, and sensors, achieving precise process operations.
Equipment signal acquisition and processing
Collect digital and analog input signals, process them and provide feedback control instructions to ensure real-time adjustment of process parameters and stable equipment operation.
Multi module communication coordination
As a communication bridge between various sub modules within the device, it enables data exchange and synchronization of operating status, and supports interface communication with the upper control system.
Process flow logic execution
Built in process logic program, realizing equipment action sequence control, supporting automated execution of complex process steps.
Equipment operation monitoring and safety protection
Equipped with fault detection, self diagnosis, and alarm functions, ensuring safe equipment operation and rapid fault response.
Product imag

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