TEL Tokyo Electron 1B80-002396-11 Valve Area Plate

TEL Tokyo Electron 1B80-002396-11 Valve Area Plate

Product Details Introduction

Product model: TEL Tokyo Electron 1B80-002396-11

Product type: Valve Area Board/Valve Manifold PCB

Functional positioning: Drive and signal interface module for controlling and managing gas valves or liquid valves

1、 Product Function Overview:

The 1B80-002396-11 valve area board is one of the specialized control boards used by Tokyo Electron (TEL) in its semiconductor process equipment. This module is used to centrally control the opening and closing actions of multiple gas or liquid valves, as well as monitor their status signal feedback. It is mainly used in key units such as gas supply system (GAS BOX), chemical supply system (CUC), vacuum control system, etc.

2、 Main application areas:

Semiconductor equipment gas/liquid transport control system

Control the solenoid valves and proportional valves used in CVD, Etcher, PVD and other equipment to transport chemical gases (such as SiH ₄, NH ∝, O ₂, etc.) or liquid chemicals, ensuring that materials are supplied in the set order and flow rate during the process flow.

Valve group integrated control platform

As an integrated drive interface for multiple valves, it achieves centralized control and unified power distribution, reduces wiring complexity, and improves maintenance efficiency.

Automatic switching system for gas and liquid circuits

Applied to process path management such as gas channel switching, backup gas source conversion, and purge control, ensuring safe and reliable system operation.

Real time status monitoring and alarm feedback

Collect valve switch status and pressure sensor signals, and combine them with the main control system to provide alarm and shutdown protection for abnormal situations (such as valve jamming and pressure deviation).

Equipment interlocking and process linkage control

Linked with the process control program, such as pressure regulation of the process chamber, plasma opening, cleaning steps, etc., necessary gas/liquid control actions are triggered through the valve area plate.

Product imag

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