TEL Tokyo Electron MPC-T0070A-12 Input/Output Module

TEL Tokyo Electron MPC-T0070A-12 Input/Output Module

Product Details Introduction

Product model: TEL Tokyo Electron MPC-T0070A-12

Product Type: I/O Module

Functional positioning: Signal communication interface component between control system and on-site equipment

1、 Product Function Overview:

MPC-T0070A-12 is an industrial grade I/O module used in Tokyo Electron semiconductor equipment to enable input and output signal interaction between main control systems (such as control boards, PLCs, embedded control units) and various actuators and sensors. This module is usually installed in the equipment backplane or control rack as a bridge for signal conversion and data acquisition.

2、 Typical application areas:

Semiconductor manufacturing equipment control system

Installed in TEL's etching machines, deposition equipment (CVD/PVD), diffusion furnaces, cleaning equipment, etc., it controls on-site equipment such as valves, pumps, sensors, motors, etc.

Interface between digital and analog signals

Equipped with multiple channels of DI (digital input), DO (digital output), AI (analog input), and AO (analog output), used for collecting and issuing control signals for the status of various subsystems of the equipment.

Wafer handling and positioning system

Used for motion control and position feedback of wafer transfer arms, aligners, and sorting units, such as motor control, photoelectric sensing, limit switch feedback, etc.

Process parameter monitoring

Support input collection and alarm judgment of key process parameters such as temperature, pressure, and gas flow rate, ensuring the accuracy and safety of process execution.

Modular control system interface

Used for boundary signal processing between modular systems, such as data synchronization and logical judgment between different rack controllers.

Remote diagnosis and maintenance interface

By using this module to collect device operating status and error codes, it supports the upper computer diagnostic system to achieve remote alarm, fault analysis, and maintenance reminder functions.

Product imag

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