Recent Industry News on Industrial Control&Semiconductor Spare Parts
Introduction
##1、 Supply chain lead time market
1. The delivery time of semiconductor equipment has been extended, including RF generators and molecular pumps RPS、 The supply cycle of high-value spare parts such as interface boards has increased, and some models are in short supply. The market activity of second-hand refurbished spare parts has also increased.
2. There are sufficient orders from overseas manufacturers such as MKS, Edwards, and Kyosan, but the expansion progress is limited; The wafer fab has reserved key spare parts in advance, and the price of core spare parts has slightly increased.
3. The expansion of AI chips and HBM storage has driven an increase in demand for etching and coating equipment, while the demand for vacuum, RF, and motion control spare parts has grown synchronously.
##2、 Vacuum equipment
1. Edwards' new generation energy-saving dry pump has significantly reduced power consumption and upgraded anti-corrosion performance; Iterative optimization of corrosion-resistant turbo molecular pump enhances the resistance to dust and corrosive gases, and improves the service life of the pump body.
2. The usage of Shimadzu high-speed magnetic levitation molecular pumps in storage production lines has increased, and there is a growing demand for models with nitrogen purging configurations to reduce the accumulation of process by-products.
3. Domestic dry pumps and molecular pumps are gradually being introduced into mature processes, while advanced process vacuum components still rely on imports. There is a strong demand for spare parts maintenance and refurbishment services.
##3、 RF power supply, remote plasma source
1. The MKS AX7685-20 high flow RPS is increasingly used in ALD and CVD chamber cleaning scenarios, and the production line focuses on the uniformity of free radicals and continuous operation capability.
2. The mature process of domestic RF power supplies has achieved small-scale import, while high-frequency pulse high-power models still rely on imported original spare parts.
Pulse RF, fast impedance matching, and high-power water-cooled have become mainstream, and fault diagnosis and data uploading are standard features.
##4、 Board, controller, sensor module
1. The original delivery time of AMAT and Lam's control boards and IO modules is too long, and dismantling and refurbishing spare parts is an alternative cost reduction option for the production line.
Under semiconductor operating conditions, the requirements for optoelectronic isolation, electromagnetic interference resistance, and wide temperature working indicators of signal boards continue to increase.
3. AI devices drive the demand for multi-channel isolated power supply modules, with hot plugging and fault information reporting as the main design directions.
##5、 Mechanical arm moving parts
1. The demand for large-size thin wafer handling robots is increasing, with continuous optimization of low particle output, collision protection, and multi axis synchronization performance.
2. The production line prioritizes the use of modular spare parts, supports quick on-site replacement, and reduces the downtime of compression equipment.
##6、 Overall industry trends
1. The original new products focus on low energy consumption, strong anti-corrosion, intelligent diagnosis, and long maintenance cycles.
2. The supply of high-end spare parts is tight, and the domestic substitution of mature processes is accelerating. The market size of refurbished and tested spare parts is expanding.
3. AI chips and advanced packaging expansion continue to drive the vacuum, RF, and control spare parts markets.