TEL Tokyo Electron 3M80-001588-12 processor module

TEL Tokyo Electron 3M80-001588-12 processor module

Product Details Introduction

product name

TEL Tokyo Electron 3M80-001588-12 processor module

Belonging equipment

Suitable for Tokyo Electron semiconductor manufacturing equipment, especially as part of the SW300B system.

Module function

This module belongs to the AIO2 (Multi functional Input/Output) sub board and is installed on the main control board (such as 32M81-023609-15). It is responsible for:

Data collection and transmission

Control logic processing

Signal input/output coordination

Collaborate with other submodules to complete system control tasks

application area 

Widely used in Tokyo Electron's etching machines, thin film deposition equipment, cleaning systems, and other semiconductor front-end process equipment to perform the following tasks:

Control gas flow rate, temperature, voltage, current and other parameters

Receive sensor signals and transmit them to the main control system

Control the logical behavior of executing components (such as vacuum valves, RF power output, etc.)

Technical characteristics (speculation)

Due to being a dedicated module, detailed parameters have not been disclosed, but it generally has the following characteristics:

High reliability industrial grade PCB

Used in conjunction with the main control board, not running independently

Having certain anti-static and anti-interference capabilities

Communicate with the system using a specific bus or proprietary protocol

Product imag

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