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TEL Tokyo Electron 381-640841-3 Digital Input Module

Classify:Industry news |Time:2025-06-30 13:33:29

TEL Tokyo Electron 381-640841-3 Digital Input Module

Product Details Introduction

Product Name: TEL Tokyo Electron 381-640841-3 Digital Input Module

Product type: Digital Input Module

Manufacturer: Tokyo Electron Ltd


1、 Main functions:

381-640841-3 is a digital input module used in TEL semiconductor equipment, responsible for collecting external switch signals, such as:


Safety door opening and closing detection


Mechanical limit switch status


Air pressure or vacuum sensor switch status


Flow valve switch status


Status feedback of IO control devices


2、 Technical characteristics (inferred from the universal design of TEL module):

Input type: Digital signal (dry contact or voltage input, usually 24V DC)


Number of channels: possibly 8, 16, or 32 input channels


Signal isolation: Optocoupler isolation


Installation method: Backboard plug-in card, specifically designed for internal control systems of TEL devices


Communication method: Collaborate and communicate with other modules through the TEL device main control platform (such as PLC, industrial control motherboard)


3、 Application scenarios:

This module is typically used for the following Tokyo Electron devices:


Coater/Developer


CVD, Etch, PVD systems


Wafer handling and wafer loading system


Cavity control system


Safety interlock logic control circuit

Product imag

used_tel_tokyo_electron_limted_tvme-68ksf_381-640841-2_5_free_shipping.jpg

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