TEL 3D81-000044-V5 Controller Module

TEL 3D81-000044-V5 Controller Module        

Product Details Introduction

TEL 3D81-000044-V5 Controller Module

TEL 3D81-000044-V5 is compatible with TEL etching and deposition semiconductor equipment main control

Real time collection of various sensing signals such as chamber temperature, pressure, and gas flow rate

Built in signal filtering to resist electromagnetic interference in the workshop

High speed computational processing, rapid response to process instructions

Multi channel IO ports, compatible with valves MFC、 Mechanical arm components

Multi protocol communication, connecting the upper computer with various sub boards of the whole machine

Built in fault self check, quick reporting and alarm for channel abnormalities

Card insertion modular structure, easy and fast disassembly and replacement

Dust free circuit technology, suitable for clean factory working conditions

Multiple electrical protections, automatic cut-off protection against overvoltage and overcurrent

Onboard storage, long-term preservation of equipment process operating parameters

Optimized heat dissipation layout for 24-hour continuous stable operation

Compatible with 3D81 control modules of the same series, easy to expand equipment

Complete calibration and debugging at the factory, minimal on-site installation and debugging

Compact board size, saving internal space of equipment control cabinet

Overall, the TEL 3D81-000044-V5 controller module has stable computation and high integration, making it the core control board for TEL thin film and etching equipment

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